Average Reviews:
(More customer reviews)The book tries to cover many different topics at the same time and sometimes makes a quite messy work. However, the book has very good chapters and not so good ones. It provides a good introduction on MEMS fabrication, but a more interested reader will find difficult to fabricate MEMS with the given information. Chapters 5,6,7 and 8 are excellent, but chapters 9, 10,11 and 12 are incomplete and not easily understandable for a Electrical Engineer graduate student. Chapter 13 begins with general equations to be simplified considerably later, giving the impression to the reader that he has learned only a little about fluids. Chapter 11 is quite confusing and chapter 12 lack examples in 2D and 3D lumped models.
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The goal of this book is to bring together into one accessibletext the fundamentals of the many disciplines needed by today'sengineer working in the field of microelectromechanical systems(MEMS). The subject matter is wide-ranging: microfabrication, mechanics, heatflow, electronics, noise, and dynamics of systems, with and withoutfeedback. Because it is very difficult to enunciate principles of`good design' in the abstract, the book is organized around a set ofCase Studies that are based on real products, or, where appropriatelywell-documented products could not be found, on thoroughly publishedprototype work. The Case Studies were selected to sample a multidimensional space:different manufacturing and fabrication methods, different deviceapplications, and different physical effects used for transduction.The Case Study subjects are: the design and packaging of apiezoresistive pressure sensor, a capacitively-sensed accelerometer, aquartz piezoelectrically-driven and sensed rate gyroscope, twoelectrostatically-actuated optical projection displays, twomicrosystems for the amplification of DNA, and a catalytic sensor forcombustible gases. This book is used for a graduate course in `Design and Fabrication ofMicroelectromechanical Devices (MEMS)' at the Massachusetts Instituteof Technology. It is appropriate for textbook use by senior/graduatecourses in MEMS, and will be a useful reference for the active MEMSprofessional. Each chapter is supplemented with homework problems and suggestedrelated reading. In addition, the book is supported by a web site thatwill include additional homework exercises, suggested design problemsand related teaching materials, and software used in the textbookexamples and homework problems.
